The sensor utilized for the PRECISE project is produced by the acoustic systems and microdrives team at Fraunhofer ISIT, one of Europe’s leading research facilities for microelectronics and microsystems technology. The institute’s core comprises state-of-the-art clean room facilities, which are sufficiently large to facilitate research and manufacture the developed sensor chips on an industrial scale.
Fraunhofer Institute for Silicon Technology (ISIT) possesses 3500 m2 of clean room space, dedicated to the development and production of power transistors, as well as the research and production of microelectromechanical systems (MEMS). The production of semiconductor, sensor, and actuator components is based on 200 mm wafers, namely silicon wafers with a diameter of 200 mm. Additionally, the components are assembled and analyzed in the ISIT laboratories to assess their suitability for various applications.
For more information on the activities of Fraunhofer Institute ISIT, please visit their website.
PRECISE Projektteam of ISIT in front of the MEMS-Cleanroom.
